Continuous 3D Nanolithography with Ultrafast Lasers
Published:Dec 28, 2025 02:38
•1 min read
•ArXiv
Analysis
This paper presents a significant advancement in two-photon lithography (TPL) by introducing a line-illumination temporal focusing (Line-TF TPL) method. The key innovation is the ability to achieve continuous 3D nanolithography with full-bandwidth data streaming and grayscale voxel tuning, addressing limitations in existing TPL systems. This leads to faster fabrication rates, elimination of stitching defects, and reduced cost, making it more suitable for industrial applications. The demonstration of centimeter-scale structures with sub-diffraction features highlights the practical impact of this research.
Key Takeaways
- •Introduces Line-TF TPL for continuous 3D nanolithography.
- •Achieves full-bandwidth data streaming and grayscale voxel tuning.
- •Fabricates centimeter-scale structures with sub-diffraction features.
- •Eliminates stitching defects and increases fabrication speed.
- •Reduces pulse-energy requirement and lowers cost.
- •Demonstrates potential for applications in photonics, metamaterials, and biomedicine.
Reference
“The method eliminates stitching defects by continuous scanning and grayscale stitching; and provides real-time pattern streaming at a bandwidth that is one order of magnitude higher than previous TPL systems.”